JPH0128681Y2 - - Google Patents

Info

Publication number
JPH0128681Y2
JPH0128681Y2 JP20213584U JP20213584U JPH0128681Y2 JP H0128681 Y2 JPH0128681 Y2 JP H0128681Y2 JP 20213584 U JP20213584 U JP 20213584U JP 20213584 U JP20213584 U JP 20213584U JP H0128681 Y2 JPH0128681 Y2 JP H0128681Y2
Authority
JP
Japan
Prior art keywords
film
semiconductor element
shuttle
cavity
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20213584U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61117252U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20213584U priority Critical patent/JPH0128681Y2/ja
Publication of JPS61117252U publication Critical patent/JPS61117252U/ja
Application granted granted Critical
Publication of JPH0128681Y2 publication Critical patent/JPH0128681Y2/ja
Expired legal-status Critical Current

Links

JP20213584U 1984-12-28 1984-12-28 Expired JPH0128681Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20213584U JPH0128681Y2 (en]) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20213584U JPH0128681Y2 (en]) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61117252U JPS61117252U (en]) 1986-07-24
JPH0128681Y2 true JPH0128681Y2 (en]) 1989-08-31

Family

ID=30764571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20213584U Expired JPH0128681Y2 (en]) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0128681Y2 (en])

Also Published As

Publication number Publication date
JPS61117252U (en]) 1986-07-24

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